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Spin coating machine overview

Abstract: 本文概述了旋涂机(或称旋涂仪)的工作原理、应用领域和操作特点。旋涂机通过旋转产生的离心力将涂料均匀地涂覆在目标表面上,形成薄而均匀的涂层。该设备广泛应用于表面处理、半导体晶圆涂覆、光学介质涂覆及镜片底漆等领域。涂层厚度受涂料粘度、旋转速度和干燥条件影响。尽管旋涂机的基本原理未变,但其提供了多种规格和功能,适用于不同目标和涂料。操作人员需了解如何调整参数和维护设备,以确保涂覆过程的稳定性和涂层质量。

Spin Coaters, also known as Spin Coaters, are coating devices that utilize the centrifugal force generated by swirl/spin for coating. Spin Coaters are able to produce thin, uniform coatings on flat, smooth targets. These devices are widely used in surface preparation, resist coating on semiconductor wafers, Optical inspection medium coating, and various applications such as coating primers or photochromic solutions on lenses.

Coating with spin coating machine

During the coating process, the Coating drops at the center of the target surface, and the swirl/spin table begins to rotate. As the swirl/spin speed increases, the centrifugal force on the Coating diffuses the Coating evenly across the surface, forming a film. The thickness of the film depends on the viscosity of the Coating, the target swirl/spin speed, the swirl/spin initiation Acceleration, and the ventilating condition, which affects the drying speed.

One disadvantage of spin coatings is the loss of material due to the centrifugal force generated by swirl/spin to push excess liquid beyond the target range.

A typical spin coating machine has a closed swirl/spin and drip mechanism, or the lid is closed during the coating process to control ventilating, prevent equipment spillage and prevent foreign matter from entering.

Although the basic principles of the equipment have not changed over the decades, spin coatings offer a variety of specifications and features. This includes a variety of target sizes, weights and materials, as well as the ability to manually or automatically control swirl/spin speeds, or automatic dripping.


Spin coating machine overview Figure 1


In addition to the applications mentioned above, spin coatings are also widely used in the fields of Preparative Thin Film Solar Cells, Surface Coating of Biological Devices, Spreader Optical Inspection Films, and Preparative Nanomaterials. By adjusting parameters such as swirl/spin speed and Coating viscosity, spin coatings can achieve precise control of coating thickness. This precise coating thickness control is particularly important in many fields, especially in semiconductor fabrication and Optical Inspection Device Preparative. Spin coatings can be used to coat various types of coatings and materials, including organic solvent-based paints, water-based paints, photosensitive materials, and more. Coating choices will affect the performance and application of coatings. For operators using spin coatings, it is important to know how to properly adjust the parameters of the spin coatings machine and perform routine equipment maintenance and cleaning. This helps to ensure the stability of the coating process and the conformity of the coating mass.


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