Film thickness test method - Profile Gauge method

The profilometer thickness measurement method is also called the tactile method. It adopts the method of shielding before plating or dissolving after plating, so that there is no coating in a certain part , so a step is formed between the substrate and the coating. When the profile Recorder stylus scans across this step , the height of the step (ie, coating thickness) can be determined using electrical and probe motion. This method can be used to measure a wide range of coating thicknesses. For coatings from 0.01 to 1000 μm on the measuring plane . The error is within ±10% .

There are several types of profilometers: electronic stylus instruments, i.e. surface analyzers and surface profilometers, are commonly used to measure surface roughness and can also be used to record the profile of steps; electronic induction comparators with recording pins, structural It is relatively simple, and the outline of the steps can also be recorded.

These two instruments usually measure the coating thickness in the range of: 0.005~250μm for the electronic stylus instrument , and 1~1000μm for the electronic induction comparator.