Discuss and analyze the failure mode of micron-scale dural soft foundation system in scratch test

Regarding the discussion of the damage mode of the micron-scale hard film soft base system in the scratch test, a variety of hard titanium-silicon-nitride films, titanium nitride films, carbon Titanium film and diamond-like carbon film, and the experimental operation. From the analysis of the experimental research results, it is known that the scratch test of the micron-sized thick hard film shows the same law, that is, the edge of the scratch shows cracking and falling off during the whole process, and the middle part of the scratch first appears bending and cracking of the film layer. , and then the film partly detached from the substrate, and finally completely detached from the substrate; while in the scratch test of the submicron thickness diamond-like carbon film, the film rupture and detachment in the middle of the scratch occurred at the same time at the early stage of loading, and then all detachment occurred; the acoustic emission signal peak There is a good correspondence between the strength and frequency of micron-sized hard film and the degree of rupture and shedding of the micron-sized hard film, but there is no such corresponding relationship with the sub-micron-sized hard film.