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What are diamond and diamond-like carbon films?

Abstract: 金刚石和类金刚石薄膜的沉积依赖于将金刚石前体材料从气相中冷凝到目标表面。金刚石是碳的亚稳态形式,通常在沉积过程中会转变为石墨。通过化学气相沉积(CVD)和离子束增强沉积等技术,可以调整沉积材料的能量状态,从而影响薄膜的结构和特性。这些技术允许制造具有特定机械、化学、光学和热性能的薄膜,以满足不同工程应用中的需求。

The ability to diamond coat tools and engineered components requires the condensation of diamond precursor material from the gas phase in the form of a continuous thin film onto the surface of the component to be coated.

In addition, deposition needs to be performed in order to bring the vapor-deposited material to the structure and morphology of diamond. Diamond is a metastable form of carbon; therefore, when condensed from steam or a stream of energetic particles, it tends to assume its most thermodynamically stable state or form, graphite. Using excellent processes such as chemical vapor deposition (CVD) and ion beam enhanced deposition, the energy and charge state of the particles in the gas phase can be influenced to some extent, allowing for detailed analysis of the energy state (stable or metastable) and the crystallography and stoichiometric form. Therefore, a range of mechanical, chemical, optical, electronic and thermal properties are used. The actual application composition of various thin films in actual engineering will be determined by the desired thin film properties (i.e. hardness, resistivity, light transmittance, etc.) and the nature of the deposition process used to produce the thin films.


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