What are the characteristics of diamond and diamond-like carbon films?

The operating parameters of PACVD and DIOND deposition processes can be tuned to optimize the mechanical, electrical, optical and thermal properties of the deposited films. Film hardness can be optimized for wear and corrosion resistance. Films are routinely produced in the hardness range of 3000 to 4500 (DPHN), and even when they are thin (0.1 to 5.0 microns), they significantly increase the wear resistance of wearing parts and tools.

Natural diamond has a smooth surface and an extremely low coefficient of friction. The lubricity of DLC films can be further enhanced by adjusting the process parameters to increase the concentration of triangular bonded graphite structures. The diamond-like carbon film rubbed against steel produced a coefficient of friction as low as 0.001.

Figure 34.2 Synthesis of diamond films using the ion beam enhanced deposition process (DIOND). A range of diamond and diamond-like film structures can be produced at low pressures and temperatures up to 150°F.

Optical properties can also be optimized by adjusting process parameters. It is also possible to produce diamond-like carbon films that are optically transparent in the visible and infrared regions of the electromagnetic spectrum, as well as colored films.

Films with an extremely wide range of resistivities can be deposited by varying process parameters. By adjusting the relative concentration of trigonally and tetragonally bonded carbon atoms, the resistivity of the film can be varied from as low as 1 Ω cm to as high as 1 × 10(12) cm.