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Three small suggestions for improving the effect of spin coating

Abstract: 本文介绍了提高旋涂效果的三个实用技巧。首先,尝试动态滴胶,通过将化学品动态分配到旋转基材上,可以显著提升涂层质量和一致性。再有就是使用注射器适配器可以提高手动分配的准确性,该适配器专为Laurell旋涂机设计,确保针头固定在基材中心的正确高度。最后,确保基板在卡盘上的精确定位,以避免因偏离中心导致的振动、应力,甚至基材破裂和旋涂机损坏。Laurell提供了适用于不同基板类型的对准工具和卡盘解决方案,以支持精确的旋涂操作。

Three small suggestions for improving the effect of spin coating with picture 1

Three tips can improve the spin coating effect:

1. Try dynamic dispensing

You can improve the quality and repeatability of coatings by dispensing chemicals onto rotating substrates. Every Laurell Spin Coater comes with a sample dynamic dispensing program for you to experiment with.

2. Using a syringe adapter

Use syringe adapters to increase the accuracy of manual dispensing. Designed for use with all Laurell Spin Coaters, this adapter holds the tip at a consistent height directly over the center of the substrate.

3. Place your substrate accurately on the chuck.

Off-center substrates cause vibration and stress that can at least affect the quality of your coating, and at worst lead to broken substrates and damage to your Spin Coater. Laurell has alignment tools for SEMI standard wafers as well as drop-in chuck solutions for square and rectangular substrates.


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