| Ambient Temperature | 15~30℃ |
| Relative Humidity | ≤90%RH |
| Temperature range | 10~40℃ |
| Temperature control Accuracy | ±0.1℃ |
| Temperature Fluctuation | ≤±0.5℃ |
| Temperature Uniformity | ≤±0.5℃ |
| Humidity control range | 30~80 % R.H. |
| Humidity control range | ±2% R.H. |
| Humidity stability | ≤±3% RH |
| Humidity Uniformity | ≤±5% RH |
| air exchange rate | 1m3/h,±5% |
| pressure | 10±5Pa |
| Flow velocity | 0.1~ 0.3M/s (continuously adjustable) |
| Flow velocity Accuracy | ≤0.05m/s |
| Air tightness | At 1kPa positive pressure (gauge pressure), the air leakage rate in the cabin is less than 10-3 * 1M3/min |
| Gas flow rate difference | <1% |
| Chamber material | 304 mirror stainless steel plate seamless welding |
| Enclosure Material | A3 Color plating electrostatic spraying (ES) |
Warranty days: 365 days