SHIPUXINXI AES-998 Light spectrum analyzer, concave grating spectrometer

AES-998

Light spectrum analyzer

Advantages of the AES-998 optical emission spectrometer:

1. Earlier, the damping spool flow limiting technology was introduced into the direct reading spectrometer, and the combined argon regulating valve was used to optimize the argon flow direction design, reduce argon consumption, and reduce the operating cost of the instrument;

2. The self-developed analog filtering digital integration multi-channel parallel acquisition system realizes the measurement and control system with high speed, high precision and high detection ability, and improves the channel measurement range;

3. Adopt precision pulse spark power supply with FPGA as the core, and a variety of excitation conditions that can be selected by the software to meet the measurement requirements of multiple substrates and improve the accuracy and reliability of measurement;

4. According to the user's different analysis materials, different types of gratings can be configured to meet the needs of different customers;

5. The characteristic adsorption trap and solenoid valve technology can effectively prevent oil vapor from entering the optical chamber and protect the optical devices.

AES-998 Optical Emission Spectrometer Technical Parameters

Optical structure: Paxing-Runge structure, Roland circle device, optical focal length - 998.8mm                

Beam splitter: concave grating

Number of raster lines: 2160 gr/mm or 1667 gr/mm or 1080 gr/mm

Line range: 170-780nm (vacuum), 190-780nm (air)               

Dispersion: 0.47 nm/mm or 0.6 nm/mm or 0.93 nm/mm (depending on the grating)               

Detector: PMT (Photomultiplier Tube Technology)               

Wavelength range: 170nm - 780nm (Vaccum), 190nm - 780nm (Air);                 

Slit: 20 μm into the seam, 35 μm - 100 μm in the outlet

Vacuum system: vacuum degree < 3Pa 

Temperature control range: 35±0.1°C       

Argon system: professional argon throttling system             

Analytical flow rate: 4 L/min, standby flow rate: 0.5 L/min

High Voltage System: High Precision Adjustable Negative High Voltage Module&              

Voltage fluctuation <0.01%;

Temperature Drift<0.0025%

Measurement and control system: FPGA-based parallel high-speed acquisition technology, analog filtering digital integration circuit

Light source system: high-energy pre-spark technology, adjustable discharge parameters, digital control technology

Illustration of the AES-998 optical emission spectrometer

Packing list：

[Note]Because the manufacturer's packaging may be updated or upgraded, the detailed packaging list shall be subject to the latest standard configuration of the manufacturer.