| Temperature Resolution | 0.1℃ |
| Temperature control Accuracy | < +/- 0.5 ℃ (temperature control Accuracy after stabilization) |
| Temperature Uniformity of turntable | <±2% |
| Speed range | 100-5000rpm |
| Rotation speed resolution | ±1rpm |
| Maximum spin coating time | 3000s |
| Time resolution | 0.1s |
| Program settings | 100 sets of 100-step procedures |
| Standard | Adjustable jaw loading tray (10-30mm square or disc adjustable) |
None