| Pull speed | 0.1~600mm/min |
| lift itinerary | 0-100Mm (other strokes can be customized) |
| Displacement Accuracy | ±0.01mm |
| Rated linear thrust | >50N |
| Impregnation time | 1~9999.9s |
| Coating repeability interval | 1-9999.9s |
| Number of coating repeability | 1-999 times |
| Wafer Select Size | ≤100*100*5(mm) |
| Named storage coating program | 100 groups |
| Heating range | RT +~ 120 ℃ (heating type) |
| Dimensions | 227*350*416mm |
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