| Detection principle | Inductance |
| Measurement range | 200μm |
| tip radius | 5μm |
| needle tip material | diamond |
| stylus force measurement | 4mN(0.4gf) |
| stylus angle | 90° |
| Longitudinal radius of guide head | 45mm |
| Maximum driving stroke | 15mm |
| Drive speed during measurement | Sampling length = 0.25mm Vt = 0.135mm/s; sampling length = 0.8mm Vt = 0.5mm/s; sampling length = 2.5mm Vt = 1mm/s |
| Drive speed on return | V=1mm/s |
| Error of indication | Not more than +/- 10% |
| Indication change | Not more than 6% |
Warranty days: 365 days