Specifications
| X-axis sliding linear guide moving Accuracy | ≤ ±(1+|0.02L|)μm |
| X-axis positioning grating ruler resolution | 0.1μm |
| Sensors resolution | 0.02μm |
| System resolution | 1：65536 |
| Z1 linear Accuracy | ≤±(0.8+|0.15H|)μm |
| arc | ≤±（1.2＋R/8）μm |
| angle | ≤±1′ |
| straightness | ≤0.5μm/100mm |
| Measurement range | ≤150mm |
| Measurement range of Z axis | ≤ 350Mm (can be adjusted according to user request) |
| Z1 Measurement range | ≤±12mm |
| Table traverse speed | 0.05-50mm/s |
| Operating Environment | Operating temperature: 20 +/- 2 ℃ (room temperature) Humidity 20-80% RH No obvious source |
| Required Power Supply | 220V 50Hz 0.5Kw separate ground wire |
| instrument size | 980×740×1500（mm） |
| instrument Weight | About 160Kg |
Packing list
After-sales instructions
None
[Note] For after-sales services outside the Chinese mainland, if the instrument requires repair, the shipping and possible associated taxes shall be borne by the sender. Generation address of the manual: http://en.nbchao.com/p/48033/Specification.html , which is only used by users who purchase commodities from the NBCHAO.