Specifications
| Dimensions | 978*954*1714mm |
| Operating Conditions | Temperature range: 20 ° to 25 ℃ (68 ° to 77 ° F) working interval; Humidity range: ≤ 80%, no condensation |
| Software options: | Automatic graphic recognition; advanced software interface |
| Vibration isolation | High performance vibration isolation, passive pneumatic air isolator |
| scan length | 300mm |
| Number of data points covered per scan | 120,000, maximum |
| Maximum sample thickness | 50mm |
| Maximum wafer size | 300mm |
| Maximum sample Volume | 350mm |
| Step height reproducibility | < 5 Angstroms @0.1 micron height master standard, 1 standard deviation |
| vertical range | 1mm |
| Vertical resolution | Maximum 1 Angstrom (@6.55 μm range) |
| Input Power | 100 to 240VAC, 50 to 60Hz |
| Weight | 272kg (600lbs) |
Packing list
After-sales instructions
None
[Note] For after-sales services outside the Chinese mainland, if the instrument requires repair, the shipping and possible associated taxes shall be borne by the sender. Generation address of the manual: http://en.nbchao.com/p/6286/Specification.html , which is only used by users who purchase commodities from the NBCHAO.