The EN 15042-1-2006 standard provides detailed instructions on how to determine the resilience constant, Density and Film thickness of thin films using the laser-induced surface acoustic wave method. The first part of the standard clarifies the relevant terminology and procedures for the measurement of the physical properties of thin films by laser-generated surface acoustic waves, which are important for thin film analysis in the fields of materials science and engineering.
| Status | Active |
|---|---|
| CCS | ICS | (17.040.20) 表面特征 |
| Release Date | 2006-03-31 00:00:00 | Implementation Date | 2006-04-01 00:00:00 |