GB/T 18867-2025 "Electronic gas, sulfur hexafluoride" is a key technical standard in the field of semiconductors and power equipment in our country. The standard is issued by the State Administration for Market Regulation and is under the supervision of the National Technical Committee for Standardization of Semiconductor Equipment and Materials. It will be officially implemented on November 1, 2025, replacing the 2014 version of the standard. The new standard comprehensively specifies the purity index (≥ 99.99%), impurity limit (such as moisture, oxygen content, etc.) and detection method for the characteristics of electronic grade sulfur hexafluoride. Compared with the old version, it mainly optimizes the determination process of impurities such as hydrogen and hexafluoroethane, adds a safety information appendix, and strengthens the technical requirements of sampling, Encasement storage and transportation, providing more accurate quality control basis for applications such as semiconductor etching and power equipment insulation.
| Status | Active |
|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2025-04-25 00:00:00 | Implementation Date | 2025-11-01 00:00:00 |