GB/T 26250-2025 "Electronic Gas, Hydrogen Arsenide" is an important technical standard in the field of semiconductor manufacturing in our country. The standard is issued by the State Administration for Market Regulation and is under the supervision of the National Technical Committee for Standardization of Semiconductor Equipment and Materials. It will be officially implemented on November 1, 2025, replacing the 2010 version of the standard. The new standard comprehensively specifies the technical requirements, sampling methods, purity calculation (6.1), impurity determination (6.2) and metal element analysis (6.5) for electronic grade hydrogen arsenide purified from zinc arsenide as raw material. Compared with the old version, it mainly adds five impurity determination methods such as ethane, optimizes the oxygen content detection process, and strengthens the safety information (8.3) and Encasement storage and transportation requirements, providing a more accurate quality control basis for the semiconductor doping process.
| Status | Active |
|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2025-04-25 00:00:00 | Implementation Date | 2025-11-01 00:00:00 |