This standard specifies the technical requirements, test methods and their Encasement, marking, storage and transportation and safety regulations for hydrogen for use in the electronics industry. It is applicable to hydrogen treated by purification, including hydrogen in bottles, containers and pipelines. Hydrogen is mainly used in the electronics industry to provide reducing atmospheres, as a Developing solvent for epitaxial processes and as a distribution feedstock for plasma etchants. The standard aims to ensure the purity and safety of hydrogen to meet the high requirements of the electronics industry.
| Status | Active |
|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2009-10-30 00:00:00 | Implementation Date | 2010-05-01 00:00:00 |