This standard specifies the technical requirements, test methods and Encasement, marking, storage and transportation and safety regulations for helium gas used in the electronics industry. The standard applies to gaseous and liquid helium extracted by cryogenic method from natural gas, air or factory waste gas, as well as purified helium. Helium is used in the semiconductor manufacturing process for cleaning, pressurization and as a Developing solvent and protective gas. The standard ensures the mass and safety of helium gas, and meets the requirements of the electronics industry for high-purity gases.
| Status | Active |
|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2009-10-30 00:00:00 | Implementation Date | 2010-05-01 00:00:00 |