GB/T 25915.14-2022 is the 14th part of the standard for clean rooms and related controlled environments, which focuses on evaluating the suitability of equipment by particle concentration. The standard specifies the scope of application, specifies the process, method and requirements for evaluating equipment based on particle concentration in the air, covering the use of particle detection instruments, sampling point setting, detection steps, judgment criteria, etc., providing a unified technical basis for scientific and standardized evaluation of the suitability of equipment in a clean environment and ensuring the cleanliness of controlled environments.
| Status | Active |
|---|---|
| CCS | C70 | ICS | 13.040.35 |
| Release Date | 2022-12-30 00:00:00 | Implementation Date | 2023-07-01 00:00:00 |