GB/T 25915.15-2022 is part 15 of the cleanroom and related controlled environment standard, which stipulates the method of assessing the suitability of equipment and materials according to the concentration of gaseous chemicals. The standard specifies the scope of application, standardizes the evaluation process, including gaseous chemical concentration monitoring, equipment and materials tolerance testing, evaluation criteria, etc., and makes requirements for key links such as test environment and data processing, providing a unified standard for scientific judgment of the suitability of equipment and materials in a clean environment.
| Status | Active |
|---|---|
| CCS | C70 | ICS | 13.040.35 |
| Release Date | 2022-12-30 00:00:00 | Implementation Date | 2023-07-01 00:00:00 |