The standard "GB/T 36969-2018 Nanotechnology, Method for Determining Film thickness of Nano-thin Films by Atomic Force Microscopy" specifies in detail the principle, test conditions, equipment requirements, sample preparation, test steps and data processing methods for the measurement of film thickness of nano-thin films by atomic force microscopy (AFM). The standard applies to films of inorganic materials with a uniform and flat surface in the nano range, and can also be referred to for the determination of thicker or organic films. The standard includes the operation method, instrument configuration and how to handle the test data to ensure the accuracy and reliability of the measurement results.
| Status | Active |
|---|---|
| CCS | J04 | ICS | 17.040.20 |
| Release Date | 2018-12-28 00:00:00 | Implementation Date | 2018-12-28 00:00:00 |