GB/T 36053-2018 "X-ray reflection method for measurement of film thickness, Density and interface width, instrument requirements, collimation and positioning, data collection, data analytics and reports", clarifies the use of X-ray reflection method for measurement of film thickness, Density and interface width, instrument equipment, collimation positioning, data collection analysis and report writing requirements and specifications, to provide a standardized process for the measurement method, to ensure the accuracy and reliability of measurement results, help film performance testing scientific development.
| Status | Active |
|---|---|
| CCS | G04 | ICS | 71.040.40 |
| Release Date | 2018-03-15 00:00:00 | Implementation Date | 2019-02-01 00:00:00 |