GB/T 31563-2015 "Metal overlay Film thickness measurement sem", stipulates the method of sem measurement of metal overlay Film thickness. The standard covers measurement principles, instruments and equipment, sample prepative, measurement procedure, result calculation and measurement uncertainty assessment, etc., providing scientific specifications for the accurate measurement of metal overlay Film thickness, suitable for all kinds of metal overlay Film thickness detection, helping to ensure coating mass and product performance.
| Status | Active |
|---|---|
| CCS | A29 | ICS | 25.220.40 |
| Release Date | 2015-05-15 00:00:00 | Implementation Date | 2016-01-01 00:00:00 |