This standard specifies the requirements, test methods, inspection rules and marks, Encasement, transportation, storage and order contents of high-purity aluminum and aluminum alloy sputtering targets for the preparation of electronic thin films. It is suitable for all kinds of high-purity aluminum and aluminum alloy targets for the production of electronic thin films, covering the fields of semiconductor wiring, semiconductor packaging, flat panel displays and solar cells.
| Status | Active |
|---|---|
| CCS | H61 | ICS | 77.120.10 |
| Release Date | 2013-09-06 00:00:00 | Implementation Date | 2014-05-01 00:00:00 |