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GB/T 30868-2014 《Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching》 Related products

This standard specifies the test method for the determination of the microtubule Density of silicon carbide single crystal by the molten potassium hydroxide etching method, which is applicable to the mass assessment of silicon carbide single crystal materials. Microtubule defects are revealed by chemical corrosion technology and microscope observation is used to calculate the microtubule Density, providing an accurate quality control means.

This summary is not the original standard text and is for reference only. For accurate information, please obtain it through official channels.
Status Active
CCS H83
ICS 29.045
Release Date 2014-07-24 00:00:00
Implementation Date 2015-02-01 00:00:00
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