This standard specifies the cross-sectional interlayer chemical corrosion inspection method of silicon polycrystalline rods, which is suitable for silicon polycrystalline materials produced by hydrogen reduction process using trichlorosilane and silicon tetrachloride as raw materials. The standard details the method of inspection of silicon polycrystalline cross-sectional oxidation interlayer and temperature interlayer by chemical corrosion method, which provides an effective means for quality control of silicon polycrystalline materials and ensures high purity and structural integrity of materials.
| Status | Active |
|---|---|
| CCS | H80 | ICS | 29.045 |
| Release Date | 2009-10-30 00:00:00 | Implementation Date | 2010-06-01 00:00:00 |