This standard specifies a method for the determination of mg content in gallium nitride materials by secondary ion Mass spectrometry (SIMS), which is suitable for quantitative analysis of mg concentration in gallium nitride materials, and the measurement range is not less than 5 × 10 ¬ cm ³. The standard describes the determination principle, reagent requirements, equipment and interference factor control in detail, providing a reliable detection method for semiconductor material analysis.
| Status | Active |
|---|---|
| CCS | H17 | ICS | 77.040 |
| Release Date | 2020-10-11 00:00:00 | Implementation Date | 2021-09-01 00:00:00 |