GB/T 37049-2018 "Determination of metal impurity content in electronic grade polysilicon" Standard Inductance Coupled Plasma Mass Spectrometry "specifies a method for the determination of metal impurity content such as iron, chromium, nickel, copper, zinc and sodium in electronic grade polysilicon using Inductance Coupled Inductively Coupled Plasma Mass Spectrometer (ICP-MS) (ICP-MS), which is suitable for the content range of less than 5 ng/g. The standard provides an accurate Measuring method for the quality control of electronic grade polysilicon materials.
| Status | Active |
|---|---|
| CCS | H17 | ICS | 77.040.30 |
| Release Date | 2018-12-28 00:00:00 | Implementation Date | 2019-04-01 00:00:00 |