GB/T 25186-2010 focuses on the determination of the relative Sensitivity factor of secondary ion mass spectrometry in surface chemical analysis. This standard is achieved by means of ion implantation reference material. It elaborates the determination principle, specifies the required reference material, equipment and operation process. Through standardized steps, such as sample preparation, ion implantation, mass spectrometry measurement, etc., the relative Sensitivity factor can be accurately determined, providing key parameters for surface chemical analysis, helping to improve the accuracy and Reliability of secondary ion mass spectrometry analysis, and promoting the standardization of detection work in this field.
| Status | Active |
|---|---|
| CCS | G04 | ICS | 71.040.40 |
| Release Date | 2010-09-26 00:00:00 | Implementation Date | 2011-08-01 00:00:00 |