GB/T 22572-2008 Development of secondary ion mass spectrometry in surface chemical analysis. This standard describes the method of evaluating depth resolution parameters using multi-delta layer reference materials. Measurement principles are described in detail, reference materials and instruments are required, and specific operation procedures and Data processing methods are described. Through this standard, the performance of secondary ion mass spectrometry in depth resolution can be accurately evaluated, providing key technical support for surface chemical analysis, and promoting the standardization and accuracy of detection work in this field.
| Status | Active |
|---|---|
| CCS | G04 | ICS | 71.040.40 |
| Release Date | 2008-12-11 00:00:00 | Implementation Date | 2009-10-01 00:00:00 |