This standard specifies the technical requirements, inspection rules, test methods, marking, Encasement, transportation, storage and safety information requirements for electronic grade nitrogen trifluoride. It applies to nitrogen trifluoride prepared with anhydrous hydrogen fluoride and liquid ammonia or ammonium hydrogen fluoride as raw materials. The standard provides specifications for the production and application of electronic grade nitrogen trifluoride to ensure the safe use of products in high-tech fields such as semiconductors.
| Status | Active |
|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2021-10-11 00:00:00 | Implementation Date | 2022-05-01 00:00:00 |