This standard specifies the technical requirements, inspection rules, test methods, marking, Encasement, transportation and storage requirements for electronic grade hexafluorobutadiene, which is applicable to electronic grade products prepared for purification by industrial hexafluorobutadiene. By standardizing product mass and inspection methods, this standard provides technical support for the application of hexafluorobutadiene in the semiconductor and Miscellaneous electronics industries to ensure product purity and safety.
| Status | Active |
|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2021-08-20 00:00:00 | Implementation Date | 2022-03-01 00:00:00 |