This standard specifies the technical requirements, inspection rules, test methods, marking, Encasement, transportation and storage requirements for electronic grade fluoromethane, which is applicable to electronic grade products prepared for purification by industrial fluoromethane. The standard provides technical specifications for fluoromethane products in the field of electronic gases to ensure their purity and Stability in high-tech fields such as semiconductor manufacturing.
| Status | Active |
|---|---|
| CCS | G86 | ICS | 71.100.20 |
| Release Date | 2021-08-20 00:00:00 | Implementation Date | 2022-03-01 00:00:00 |