This standard specifies the technical requirements and test methods for vacuum evaporation, sputtering, ion plating and other vacuum coating equipment with pressures in the range of 10 ^ -5 Pa to 10 ^ -3 Pa. It covers the requirements for inspection rules, marking, Encasement, transportation and storage of equipment. It is suitable for the preparation of metal and Non-metallic film layers on various types of plastics, Glass and other substrates, and is an important standard in the field of vacuum technology.
| Status | Active |
|---|---|
| CCS | J78 | ICS | 23.160 |
| Release Date | 2011-11-21 00:00:00 | Implementation Date | 2012-03-01 00:00:00 |