This standard describes the extraction of metal impurities from the surface of polysilicon by acid leaching sampling method and quantitative analysis by Inductance Coupled Plasma Mass Spectrometer (ICP-MS) (ICP-MS). It is suitable for the determination of alkali metals, alkaline earth metals and transition elements (such as sodium, potassium, calcium, iron, nickel, copper, zinc, aluminum, etc.) in solar and electronic grade polysilicon. The measurement range is 0.01 ng/g to ensure that the product meets the relevant purity requirements.
| Status | Active |
|---|---|
| CCS | H17 | ICS | 77.040 |
| Release Date | 2023-08-06 00:00:00 | Implementation Date | 2024-03-01 00:00:00 |