This document specifies the methods for testing the resistivity of silicon single crystals by straight row four-probe method and direct current two-probe method. It is suitable for resistivity measurement of different types of silicon single crystals to ensure Test accuracy and reliability of results.
| Status | Active |
|---|---|
| CCS | H21 | ICS | 77.040 |
| Release Date | 2021-05-21 00:00:00 | Implementation Date | 2021-12-01 00:00:00 |