This standard specifies a method for testing the tensile strength of nano-thick films on silicon for use in microelectromechanical systems (MEMS). By describing in detail the preparation of the specimen, the configuration of the test device, and the operating steps during the test, it is ensured that the Mechanical Properties of the membrane materials can be accurately evaluated. This standard is suitable for evaluating the mechanical behavior of nano-thick films used in MEMS technology under tensile loading, providing technical support for MEMS device design and fabrication.
| Status | Active |
|---|---|
| CCS | L59 | ICS | 31.200 |
| Release Date | 2023-08-06 00:00:00 | Implementation Date | 2023-12-01 00:00:00 |