HuiNuo XTM-04 spinning coater stainless steel cavity, intelligent program-controlled homogenizing equipment 4-inch substrate
150~ 10,000 rpm (covering low-end startup to high-speed Moulding)
Speed accuracy +/- 1 rpm, acceleration range 100~ 10,000 rpm/s, speed range 150~ 10,000 rpm, program 20 groups, each group 5 segments, cavity stainless steel, Vacuum chuck, suitable for 4-inch substrate, optional temperature control cavity to 200 ℃.