CHINA 10A-4 touch screen four-station Spin Coater
SE
100~7000rpm
A 4-station Spin Coater for 40mm diameter silicon wafers, each station can operate independently to meet the needs of different silicon diameters. Speed range of stations is wide, soft start can be adjusted, and the glue leveling process is automatically controlled. Touch screen display and control, 12 sets of process parameters can be pre-stored, each set of 5 segments, easy to operate.