SETCAS SC-UV-I UV Ozone Cleaner, Dry Fine Cleaning Equipment
SE
SC-UV-I
Setcas SC-UV-I Ultraviolet ozone cleaning machineSPEC
Setcas SC-UV-I Ultraviolet ozone cleaning machineDetails
Setcas SC-UV-I Ultraviolet ozone cleaning machinePacking list
- SKU
- NB039846
- material
- The fuselage is made of stainless steel as a whole, which is resistant to acid and alkali and corrosion
- structure
- Drawer type sample table, simple and convenient to take and put the substrate
- gas path
- Reserve the air inlet interface to enrich the cleaning types of equipment
- protect
- Drawer opening and closing work interlock with UV lamp to avoid UV damage
- Timer
- Button timer, digital countdown, intuitive
- operation
- The cleaning process can be terminated manually at any time
- Accessories
- Optional ozone neutralizer to avoid ozone damage
- Cleaning band
- 185Nm and 254nm
- Average light intensity of 3-5mm from UV lamp
- 28~32mW/cm²
- lamp
- Double wave low pressure mercury lamp
- Lamp power
- 150W
- Irradiated area
- 150mm×200mm
- Adjustable irradiation distance
- 5~40mm
- Timer working interval
- 0~99min99s with automatic countdown function
- Inlet and outlet
- Air inlet: φ8mm, air outlet: φ25mm
- Equipment appearance size
- 250mm（W）×300mm（D）×260mm（H）
- Pallet size
- 160mm（W）×200mm（D）×5~30mm（H）
- Product Weight
- 8 KG
Introduction
SC-UV series ultraviolet ozone cleaning machine: It is a dry fine cleaning equipment, which can be used to clean various single crystal substrates to ensure better film quality. At the same time, it can also remove photoresist, improve material surface wettability, clean SEM and TEM samples and UV-activated polymers, etc.
Ultraviolet ozone cleaning provides an acid-free, dry and atomic-level cleaning method that does not damage materials, and is especially suitable for removing some organic compounds. The ultraviolet lamp mainly emits light of two wavelengths: 185nm and 254nm, among which the light of 185nm can change the oxygen in the air into ozone, and the light of 254nm can destroy the bonds in the compound (especially the carbon-carbon bond); so the light of these two wavelengths Combination effectively removes organic compounds.
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