The JJF 1916-2021 Scanning Electron Microscope calibrate specification is intended to specify the calibrate requirements and procedures for Scanning Electron Microscopes. The standard applies to Electron Microscopes (EM) that use electron beams to scan the surface of a sample and generate high-resolution images. Emphasis of calibrate includes calibration of resolution and calibrated mesh spacing using standard templates to ensure accuracy and traceability of measurement results. Electron Microscope (EM) produces secondary electronic signals and backscattered electronic signals through focused electron beams to obtain topographic information of the sample surface, with nanoscale resolution.
| Status | Active |
|---|---|
| CCS | ICS |
| Release Date | 2021-07-28 00:00:00 | Implementation Date | 2022-01-28 00:00:00 |